Ultrahigh 22 nm resolution EUV coherent diffraction imaging using a tabletop 13 nm high harmonic source

We implement coherent diffractive imaging (CDI) using a phase-matched high-harmonic generation (HHG) source at 13 nm, demonstrating reconstructed images with a record 22 nm resolution for any tabletop, light-based microscope. We also demonstrate the first reflection-mode CDI using a compact extreme ultraviolet (EUV) source, achieving approximate to 100 nm resolution. A clear path towards even higher spatial resolution reflection-mode tabletop imaging using apertured-illumination schemes will be discussed.