May 3, 2024 • By Veronica Lingo
- KMLabs
- News and Events
Meet with KMLabs at Photonics West
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KMLabs' XUUS™-5 integrated in-situ with Spectra-Physics Solstice® Ace™ delivers high-flux 30-120 eV EUV photons
Using a Spectra-Physics Solstice Ace Ti:sapphire-based femtosecond amplifier and a KMLabs’ XUUS-5 high-harmonic-generation system we demonstrate a high flux, stable, coherent EUV light source with...
Using Light Conversion’s industrial-grade PHAROS femtosecond laser and KMLabs’ XUUSTM-5 high-harmonic-generation system we demonstrate a high flux, ultrastable, coherent EUV light source with photon...
Recap of 3/24 OSA webinar "High-Harmonic Sources for Material Development and Metrology in the Semiconductor Industry"
The webinar hosted on 3/24 by the OSA Short Wavelength Sources and Attosecond/High Field Physics Technical Group showcased a very recent important technological application of attosecond science in...
Attolab uses KMLabs' 13nm EUV source to demonstrate the high-NA capabilities of EUV interference lithography
Imec, a world leader in nanoelectronics and digital technologies, reported using KMLabs' 13.5 nm XUUS high harmonic generation source for printing 20nm pitch line/spaces using interference...
Hyperion VUV named one of three promising combustion technologies at 38th International Symposium on Combustion
In her opening lecture at 38th International Symposium on Combustion in late January 2021, Prof. Katherina Kohse-Hoinghaus featured KMLabs' Hyperion VUV light source as one of the three promising...