HHG output characteristics

HHG upper-bound cut-off energy

Calculate the single-atom upper-bound cutoff EUV photon energy one can expect to generate with the classical model by calculating the Ponderomotive energy and using the gas-specific ionization energy.

However knowing the single atom cut-off energy is insufficient, phase matching is also a critical criteria that needs fulfilled in HHG operation and KMLabs has decades of expertise in this area.

3.17U_p + I_p = 3.17 x 9.337381.2 x π ω_o² Eτ λ² + I_p = [Cutoff Photon Energy] = eV

0.1

5.0

Pulse energy E (mJ)

500

Beam waist ω_o (μm) in radius

μm

400

Pulse duration τ (fs)

200

2000

Center wavelength λ (nm)

Ionization potential based on gas type

Cutoff Photon Energy eV

Typical range of EUV photon energy

Output EUV photon energy range in practice may differ depending on final setup from the given general reference info below.

Common pump laser center wavelength

Common gas type

HHG photon energy range

24 eV 53 nm

55 eV 23 nm

50 eV 24 nm

75 eV 16 nm

83 eV 15 nm

120 eV 10 nm

18 eV 69 nm

30 eV 41 nm

32 eV 38 nm

62 eV 20 nm

eV nm

Minimum needed pump pulse energy

Optimal parameters to be used in practice may differ based on customer specific requirements from the given general reference information here.

HHG wavelength of interest, within 10 - 70 nm

Pulse duration

2 mJ using He Gas

1 mJ using Ne Gas

0.1 mJ using Ar Gas

1 mJ using Ar Gas

2 mJ using Ne Gas

5 mJ using Ne or He Gas

At-source photon flux vs. repetition rate

The plots are to illustrate a general trend and not exactly to scale.

Typical operation parameters in HHG

Over-driven scenarios see an increased flux while other beam quality metrics worsen, e.g. bandwidth, pointing stability, etc.

HHG beam spot size

Acceptable pump beam input spot size :

4 - 13mm in diameter

Nominal spot size at HHG source output :

50 𝛍m in diameter

Nominal spot size at sample

( 1:1 or assuming typical demag ratio range , ~6 ft beamline from source ) :

30 - 200 𝛍m in diameter

HHG harmonic bandwidth

Normal bandwidth of a single harmonic :

Measured at 1.0 - 1.4eV max. ( He , 13nm , 2mJ),
Measured at 0.3 -0.7eV max. ( Ar , 30nm , 0.5mJ ),
Measured at 0.05 - 0.2eV max. ( Ne , 60nm , Yb, 1mJ ),
resolution - limited by KMLabs standard imaging spectrometer configuration.

HHG 光斑尺寸

可用红外泵浦源光斑大小:

直径须在 4-13 毫米范围内

在高次谐波光源出口的常见光斑大小:

直径约为 50 微米

实验可用的常见光斑大小

(等比缩小或者常见缩小比例,假设实验样本距离高次谐波光源出口约2米距离):

直径范围 30-200 微米

HHG 谐波带宽

单个谐波的常见线宽:

测量极大值 1.0 - 1.4 电子伏 (氦, 13纳米, 2微焦),
测量极大值 0.3 - 0.7 电子伏 (氩, 30纳米, 0.5微焦),
测量极大值 0.05 - 0.2 电子伏 (氖, 60纳米, 镱, 1微焦),
分辨率可能受限于KMLabs标准极紫外成像光谱仪的组成.

范例光谱展示

Want to learn more? Watch a short video clip on HHG intro presented by KMLabs' cofounder, Dr. Margaret Murnane, on 2021 CLEO Plenary speech below.

Extreme Ultraviolet Sources

Vacuum Ultraviolet Source

Integrated Systems

Ultrafast Ti:S Laser/Amplifiers

Ultrafast Ti:S Lasers / Oscillators

Accessories

XUUS-5 HHG Source Output Characteristics

HHG upper-bound cut-off energy

Typical range of EUV photon energy

Output EUV photon energy range in practice may differ depending on final setup from the given general reference info below.

Minimum needed pump pulse energy

Optimal parameters to be used in practice may differ based on customer specific requirements from the given general reference information here.

At-source photon flux vs. repetition rate

The plots are to illustrate a general trend and not exactly to scale.

Typical operation parameters in HHG

Over-driven scenarios see an increased flux while other beam quality metrics worsen, e.g. bandwidth, pointing stability, etc.

HHG beam spot size

HHG harmonic bandwidth

HHG 光斑尺寸

HHG 谐波带宽

KMLABS Leading in ultrafast

4775 Walnut St., Suite 102 Boulder, CO 80301

Extreme Ultraviolet Sources

Vacuum Ultraviolet Source

Integrated Systems

Ultrafast Ti:S Laser/Amplifiers

Ultrafast Ti:S Lasers / Oscillators

Accessories

XUUS-5 HHG Source Output Characteristics

HHG upper-bound cut-off energy

Typical range of EUV photon energy Output EUV photon energy range in practice may differ depending on final setup from the given general reference info below.

Minimum needed pump pulse energy Optimal parameters to be used in practice may differ based on customer specific requirements from the given general reference information here.

At-source photon flux vs. repetition rate The plots are to illustrate a general trend and not exactly to scale.

Typical operation parameters in HHG Over-driven scenarios see an increased flux while other beam quality metrics worsen, e.g. bandwidth, pointing stability, etc.

HHG beam spot size

HHG harmonic bandwidth

HHG 光斑尺寸

HHG 谐波带宽

KMLABS Leading in ultrafast

4775 Walnut St., Suite 102 Boulder, CO 80301

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Typical range of EUV photon energy

Output EUV photon energy range in practice may differ depending on final setup from the given general reference info below.

Minimum needed pump pulse energy

Optimal parameters to be used in practice may differ based on customer specific requirements from the given general reference information here.

At-source photon flux vs. repetition rate

The plots are to illustrate a general trend and not exactly to scale.

Typical operation parameters in HHG

Over-driven scenarios see an increased flux while other beam quality metrics worsen, e.g. bandwidth, pointing stability, etc.