Sub-Wavelength EUV Imaging with 12.6nm Spatial Resolution Employing 13.5nm High Harmonic Beams

We demonstrate a record sub-wavelength 12.6 nm spatial resolution for EUV imaging using 13.5 nm illumination from a high-harmonic light source. Modulus enforced probe ptychographic coherent diffractive imaging allows for large-field quantitative imaging of near-periodic objects.