Coherent Ptychographic Imaging Microscope With 17.5nm Spatial Resolution Employing 13.5nm High Harmonic Light

High-resolution imaging is an essential tool for understanding nanoscale systems. In particular, tabletop extreme ultraviolet (EUV) coherent diffractive imaging (CDI) techniques based on high harmonic generation (HHG) are ideal for investigating complex nanostructured systems, including their static and dynamic electronic, phononic and magnetic properties.

Tabletop EUV CDI combines elemental and chemical selectivity with nanometer spatial resolution, with pulse durations in the femtosecond (fs)-toattosecond (as) range [1-5]. In this work, we use ptychographic CDI [6-7] with high-spatial-coherence 13.5nm tabletop HHG to obtain 17.5nm spatial resolution images of a zone plate.

This is the highest demonstrated resolution for a full-field tabletop microscope using any light source.