KMLabs, STROBE Science and Technology Center at CU Boulder, and imec's Attolab have worked collaboratively to present the world's first phase-sensitive extreme ultraviolet (EUV) imaging reflectometer.

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The 22nd China International Optoelectronic Exposition (CIOE 2020)

Dates:  September 9-11, 2020

Seth Cousin, Director of Products at KMLabs, gave a CLEO talk discussing KMLabs' collaboration with imec:  attolab. The aim of imec's attolab is to study ultrafast kinetics of EUV exposure processes...

Our very own, Dan Hickstein (Product Manager of the Hyperion VUV Laser System) and Seth Cousin (Director of Products) have CLEO talks on May 13th and 14th during the virtual technical sessions....

Resolving problems in advanced lithography could push this technology much more into the mainstream, but that won’t be easy.