Seth Cousin, Director of Products at KMLabs, gave a CLEO talk discussing KMLabs' collaboration with imec: attolab. The aim of imec's attolab is to study ultrafast kinetics of EUV exposure processes and ultra-small pitch lithography for next generation chips. imec will study these processes with KMLabs' Pantheon EUV laser system based on tabletop scale high harmonic generation technology.
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Abstract: An ultra-short pulsed, ultra-broadband (~13nm-~13µm) light-source has been developed to drive atto- to femto- second time-resolved studies on EUV photo-resist materials. The same source will also be used to investigate EUV driven nano-lithography.
Speaker: Seth Cousin (KMLabs)
Authors: S. Cousin, C. Bargsten, E. Rinard, R. Ward, E. Hosler, B. Petersen, H. Kapteyn, KM Labs| P. Vanelderen, J. Petersen, P. van der Heide, imec
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